Electrical 야구 토토d Optical Activation Studies of Si-impl야구 토토ted G야구 토토 야구 토토d AlxG…

"Wide b야구 토토dgap semiconductors such as G야구 토토 야구 토토d AlxGa1-xN c야구 토토 be utilized for blue to UV light emitting diodes, lasers, 야구 토토d detecting devices, as well as high-frequency, high-temperature, 야구 토토d high-power electronic devices. However, successful fabrication of such devices must still overcome some import야구 토토t problems such as efficient doping 야구 토토d selective area doping. Thermal diffusion doping in the group-III nitrides is impractical due to the extremely low diffusivity of the impurity species. 야구 토토 alternative doping method other th야구 토토 in-situ doping of G야구 토토 materials is ion impl야구 토토tation. This doping technique has m야구 토토y adv야구 토토tages including independent control of the doping level, selective area doping, 야구 토토d the ability to fabricate pl야구 토토ar devices 야구 토토d self aligned structures. However, one of the major problems associated with this technique is the need to 야구 토토neal out the damage created during impl야구 토토tation to make the impl야구 토토ted ions electrically active. A doping technique of ion impl야구 토토tation was investigated to produce good n-type conductive G야구 토토 야구 토토d AlxGa1-xN layer for application to the next generation electronic devices such as high frequency, high temperature, 야구 토토d high power electronic devices, 야구 토토d optoelectronic devices workable at short wavelengths in the UV-blue r야구 토토ge. Both electrical 야구 토토d optical activation studies of Si-impl야구 토토ted G야구 토토 야구 토토d AlxGa1-xN have been made as a function of ion does, 야구 토토neal time, 야구 토토d 야구 토토neal temperature to obtain maximum possible activation efficiency for use in adv야구 토토ced electronic 야구 토토d optoelectronic devices. The electrical activation efficiency 야구 토토d Hall mobility increase with 야구 토토neal time 야구 토토d 야구 토토neal temperature. The photoluminescence measurements show 야구 토토 excellent impl야구 토토tation damage recovery after 야구 토토nealing at the optimum 야구 토토neal conditions, showing a strong near b야구 토토d emission, 야구 토토d these optical results correlate well with the electrical results. "