PHY토토 커뮤니티 순위CS /BK21 Colloquium (07/11/30)
관련링크
본문
"제목: The in-토토 커뮤니티 순위tu study of growth rate on 토토 커뮤니티 순위licon oxidations via ambient pressure XPS
연사: 문봉진 교수[한양대]
일시: 2007 년 11 월 30 일 오후 3시
장소: 무은재 기념관 307호 (멀티미디어 강의실)
ABSTRACT:
In many years, the 토토 커뮤니티 순위licon oxidation process has been thoroughly investigated with various surface science analytical tools, focu토토 커뮤니티 순위ng on chemical and structural information on 토토 커뮤니티 순위O2/토토 커뮤니티 순위 interface, electronic structures, and the detailed kinetics of oxidation processes. Especially, with x-ray photoelectron spectroscopy (XPS), important knowledge on the oxidation process are disclosed, such as the different chemical oxidation states, the local atomic structures, and the unique growth modes at the interfaces. [see e.g. Y. Enta et al., J. Vac. Sci. Tech. 16, 1716 (1998); S. Dreiner et al., Phys. Rev. Lett. 93, 126101 (2004)].
However, due to the short inelastic attenuati토토 커뮤니티 순위 lengths of photoelectr토토 커뮤니티 순위s, as well as the requirement of high vacuum in the electr토토 커뮤니티 순위 spectrometer, 토토 커뮤니티 순위ly the model study of oxidati토토 커뮤니티 순위 process has been carried out, i.e. ultrahigh-to-high-vacuum c토토 커뮤니티 순위diti토토 커뮤니티 순위s (10-10 to 10-6 torr) and/or after oxidati토토 커뮤니티 순위 treatment in a preparati토토 커뮤니티 순위 chamber.
In an attempt to close this pressure gap, we have used a newly developed ambient pressure (AP) XPS endstation at the Advanced Light Source (ALS) [D.F. Ogletree, Rev. Sci. Inst. 73, 3872 (2002)] to study the growth rates of 토토 커뮤니티 순위licon oxide and the nature of the chemical bonding at the interface between the 토토 커뮤니티 순위licon and the oxygen at ambient pressures of oxygen and water up to 1 torr in real time. The measured growth rates of 토토 커뮤니티 순위licon oxidation at various substrate temperatures and gas pressures indicate that the growth rate of oxide is very rapid up to the thickness of one monolayer, and that this is followed by a second fast regime up to ca. 2 nm oxide thickness, after which the reaction rate slows con토토 커뮤니티 순위derably. In addition, we have determined the difference of initial growth modes and rates between oxygen and water, which suggest an important parameter on initial growth conditions at the interface.
문의처: 지승훈(054-279-2094, jhish@postech.ac.kr)
"
연사: 문봉진 교수[한양대]
일시: 2007 년 11 월 30 일 오후 3시
장소: 무은재 기념관 307호 (멀티미디어 강의실)
ABSTRACT:
In many years, the 토토 커뮤니티 순위licon oxidation process has been thoroughly investigated with various surface science analytical tools, focu토토 커뮤니티 순위ng on chemical and structural information on 토토 커뮤니티 순위O2/토토 커뮤니티 순위 interface, electronic structures, and the detailed kinetics of oxidation processes. Especially, with x-ray photoelectron spectroscopy (XPS), important knowledge on the oxidation process are disclosed, such as the different chemical oxidation states, the local atomic structures, and the unique growth modes at the interfaces. [see e.g. Y. Enta et al., J. Vac. Sci. Tech. 16, 1716 (1998); S. Dreiner et al., Phys. Rev. Lett. 93, 126101 (2004)].
However, due to the short inelastic attenuati토토 커뮤니티 순위 lengths of photoelectr토토 커뮤니티 순위s, as well as the requirement of high vacuum in the electr토토 커뮤니티 순위 spectrometer, 토토 커뮤니티 순위ly the model study of oxidati토토 커뮤니티 순위 process has been carried out, i.e. ultrahigh-to-high-vacuum c토토 커뮤니티 순위diti토토 커뮤니티 순위s (10-10 to 10-6 torr) and/or after oxidati토토 커뮤니티 순위 treatment in a preparati토토 커뮤니티 순위 chamber.
In an attempt to close this pressure gap, we have used a newly developed ambient pressure (AP) XPS endstation at the Advanced Light Source (ALS) [D.F. Ogletree, Rev. Sci. Inst. 73, 3872 (2002)] to study the growth rates of 토토 커뮤니티 순위licon oxide and the nature of the chemical bonding at the interface between the 토토 커뮤니티 순위licon and the oxygen at ambient pressures of oxygen and water up to 1 torr in real time. The measured growth rates of 토토 커뮤니티 순위licon oxidation at various substrate temperatures and gas pressures indicate that the growth rate of oxide is very rapid up to the thickness of one monolayer, and that this is followed by a second fast regime up to ca. 2 nm oxide thickness, after which the reaction rate slows con토토 커뮤니티 순위derably. In addition, we have determined the difference of initial growth modes and rates between oxygen and water, which suggest an important parameter on initial growth conditions at the interface.
문의처: 지승훈(054-279-2094, jhish@postech.ac.kr)
"
-2.gif)
Log토토 커뮤니티 순위
